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日前,国立大学法人东海国立大学组织名古屋大学未来材料与系统研究所Jun Suda教授、Hiroshi Amano教授和旭化成株式会社的研究小组首次成功地使用氮化铝(AlN)来制造出具有理想特性的p-n结。

据了解,AlN基半导体作为下一代高频器件和功率器件的材料而备受关注,而p-n结是构成半导体器件基础的基本结构,这一结果将成为未来发展AlN基器件的基础。

随着UWBG半导体研究的进展,可以通过减少功率器件的损耗来进一步实现节能,并通过提高高频器件的频率来提高通信速度。

然而,UWBG半导体的共同技术问题是难以形成作为电子器件基础的p-n结(使用Si和GaAs等传统半导体很容易形成p-n结;(这导致了早期的实际应用))。这项研究的要点我们使用了一种称为分布式极化掺杂(DPD)的方法来代替传统的杂质掺杂,该方法在空间上改变化学成分(将百分之几到百分之三十的GaN与AlN混合)。通过使用这种材料,目标是实现AlN基p层和n层具有优异的性能。

实验中所制备的AlN基p-n结通过电流注入表现出理想的电流-电压特性、电压-电容特性和发光特性。特别是电流-电压特性显示出优异的耐高电压性。这是世界上第一个实现满足所有这些优异特性的AlN基p-n结。在高电压特性方面,电介质击穿场强为7.3MV/cm,是传统半导体Si的25倍,与具有优异电介质击穿场强的SiC和GaN等宽带隙(WBG)半导体相比,它也是价值的两倍。

该研究主要使用旭化成子公司Crystal IS开发的高品质AlN单晶基板,名古屋大学与旭化成共同开发的AlN薄膜晶体生长技术,名古屋大学能源转换实验设施(C-TEFs))的下一代半导体洁净室是通过器件形成技术实现的。

来源:minkabu.jp、综合整理


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